Product Features

PRODUCT FEATURES

Clean ovens are widely used for heat treatment/drying or aging of semiconductor wafers, liquid crystals, optical modules, camera modules, and other parts and equipment that require high baking requirements. They are also suitable for installation in clean room environments. The cleanliness level of 100 is mainly achieved through the use of primary filters, HEPA high-efficiency filters, and front and rear laminar flow circulation systems, providing stable performance during heating or cooling processes. Rapid heating and recovery time ensure excellent temperature control and uniformity. Featuring a unique mechanical convection airflow system. The fan takes away the heat generated by the bottom oven to prevent damage to the top unit.

The clean oven uses a PT100 platinum sensor to measure the actual chamber temperature, and a 0.3 µ mHEPA high-efficiency filter to effectively circulate and filter the air. The oven also has a flow meter and NPT accessories, which introduce inert gases such as nitrogen into the chamber for special process baking, and can maintain oxygen levels as low as 200PPM.

The external material of the clean oven is SPCC steel plate, which has been washed with soda water and treated with powder coating paint; The interior is made of corrosion-resistant stainless steel. Equipped with four adjustable perforated stainless steel brackets, the brackets and body are easy to disassemble and clean.

The safety features include multiple protection mechanisms such as independent over temperature protection, phase sequence protection, and power-off protection to ensure safe use. There is a safety door that can only be opened after baking and cooling to the specified temperature to ensure the safety of operators.

1. SUS304 1.5mm stainless steel plate, fully welded process;

2. The air duct inside the box is equipped with a clean air inlet and a high-efficiency filter. Both ventilated and non ventilated modes can be used to ensure a slight positive pressure inside the box, preventing pollutants from entering the inner box;

3. The high-efficiency HEPA filter is used to construct a clean room, which can filter the gas inside the box unidirectionally and cyclically. According to usage requirements, it can meet the requirements of various cleanliness levels such as ISO Class 5 (National Standard 100), ISO Class 6 (National Standard 1000), ISO Class 7 (National Standard 10000), etc;

4. Configure an automatic nitrogen filling device and perform nitrogen filling and baking with automatic opening and closing of the air door;

5. Newly developed touch screen operating system with high-precision PID controller, temperature control accuracy of ± 0.1 ℃, automatic constant temperature. You can save formulas, view temperature curves, export heating data, etc;

6. Customization is acceptable according to usage requirements.

Product parameters

PRODUCT PARAMETERS

customized service

CUSTOM SERVICE

Shenzhen Yihexing can provide varying degrees of uniformity, size, and temperature range; If you have specific requirements or specifications, please contact us based on your needs so that we can ensure that the design, testing, and adjustment of the equipment can meet your requirements.